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Physico chemistry of solids, thin films, biotechnologies
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Aerosol Assisted Chemical Vapor Deposition - AACVD

Among the liquid-source CVD techniques, the AACVD by the use of ultrasonic spraying allows an elaboration at atmospheric pressure under conditions leading to a very well controlled growth as illustrated by different growth type according to the experimental conditions:

- epitaxial growth [VO2/Saphir, SnO2/TiO2 ]

- controled texture [Cu2O] 

- 3D nanostructure – nanoflowers  [TiO2-].

The CVD technique is also versatile in terms of growth conditions and class of materials:

Improvement of luminescence properties by plasma or UV assisted deposition (optical amplification and spectral conversion of solar radiation)

Deposition of fluoride (YF3: Er) and oxyfluoride film highly luminescent by the use of fluorinated precursors.

  Main publications

"The Role of Humidity in Tuning the Texture and Electrical Properties of Cu2O Thin Films Deposited via Aerosol-Assisted CVD", H. Liu, V. H. Nguyen, H. Roussel, I. Gélard, L. Rapenne, J.-L. Deschanvres, C. Jiménez, D. Muñoz-Rojas, Adv. Mater. Interfaces (2018) 1801364.

“Exploring the optical properties of Vernier phase yttrium oxyfluoride thin films grown by pulsed liquid injection MOCVD”, S.-T. Zhang, M. Modreanu, H. Roussel, C. Jiménez and J.-L. Deschanvres, Dalton transaction, 47 (2018) 2655-2661.

“Up-conversion luminescence in Er/Yb-doped YF3 thin films deposited by PLI-MOCVD”, E.L. Payrer; A.L. Joudrier ; P. Aschehoug; R.M. Almeida; J.L Deschanvres , Journal of Luminescence, 187 (2017) 247-254.

“Structural study of TiO2 hierarchical microflowers grown by aerosol-assisted MOCVD”, Biswas S , Kar A , Jiménez C , Khan A , Forissier S , Muñoz-Rojas D , Deschanvres J L., CrystEngComm, vol. 19, issue 11 (2017) 1535-1544.

“The quest towards epitaxial BaMgF4 thin films: Exploring MOCVD as a chemical scalable approach for the deposition of complex metal fluoride films”, Battiato, S.a, J-L. Deschanvres, H. Roussel, L. Rapenne, B. Doisneau, G G. Condorelli, D. Muñoz-Rojas, C Jiménez, G. Malandrino., Dalton Transactions, 45, Issue 44 (2016) 17833-17842.

“Efficient upconversion in Er3+ doped Y2O3/Si thin film deposited by aerosol UV-assisted MOCVD process”, Rached Salhi and Jean-Luc. Deschanvres, Journal of Luminescence, 170 (2016) 231-239.

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Date of update October 21, 2019

  • Tutelle CNRS
  • Tutelle Grenoble INP
Univ. Grenoble Alpes