R. Boichot, L. Tian, M.-I. Richard, A. Crisci, A. Chaker, V. Cantelli, S. Coindeau, S. Lay, T. Ouled, C. Guichet, M. H. Chu, N. Aubert, G. Ciatto, E. Blanquet, O. Thomas, J.-L. Deschanvres, D. D. Fong, and H. Renevier. Chemistry of Materials, 28 – 2 (2016) 592-600, http://dx.doi.org/10.1021/acs.chemmater.5b04223
One of the main instrumental achievement is the MOON reactor, a unique instrument which can be used in-house as a CVD or ALD reactor and also coupled to the SOLEIL synchrotron (St Aubin, France) to perform in situ growth studies including diffraction, fluorescence, substrate curvature, absorption and Raman spectrospcopies. It is in operation since the beginning of 2014. Initial efforts are being focused on the synthesis of ZnO nanowires by ALD as a model system.
ALD reactor (MOON) installed at beamline SIRIUS (SOLEIL, St Aubin). Inset: kSA MOS for optical measurement of substrate curvature during growth